EurekAlert! -
29 Jan 2019 07:00
(American Institute of Physics) Semiconductor manufacturing involve cleaning processes, and it's become highly desirable to use physical cleaning techniques such as liquid jets or underwater ultrasound instead of toxic chemicals. Now, mechanical engineers specializing in the mechanism of fluid motion at Keio University have unveiled the underlying physics of what happens when liquid jet collisions strike surfaces to be cleaned. They report their work in the journal Physics of Fluids.
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