A birefringence based light modulator that works in the wavelength region of < 350 nm plays a vital role in DUV beam shaping, high density data storage, semiconductor micro-nano processing and photolithography. Actually, a series of DUV birefringent materials, including single crystals of α-BBO, MgF2, Ca(BO2)2, and α-SnF2, have thus been made and commercially used. However, these birefringent elements have fixed birefringence, limiting their capability of continuous light modulation.
Deep-ultraviolet birefringent hydrogel based on 2D cobalt-doped titanate
Phys.org - 13 Jan 2023 17:00
A birefringence based light modulator that works in the wavelength region of < 350 nm plays a vital role in DUV beam shaping, high density data storage, semiconductor micro-nano processing and photolithography. Actually, a series of DUV birefringent materials, including single crystals of α-BBO, MgF2, Ca(BO2)2, and α-SnF2, have thus been made and commercially used. However, these birefringent elements have fixed birefringence, limiting their capability of continuous light modulation.
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