Compact solid-state laser system generates 193-nm vortex beam for the first time

Deep ultraviolet (DUV) lasers, known for their high photon energy and short wavelengths, are essential in various fields such as semiconductor lithography, high-resolution spectroscopy, precision material processing, and quantum technology. These lasers offer increased coherence and reduced power consumption compared to excimer or gas discharge lasers, enabling the development of more compact systems.